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Materials 2014, 7(8), 5633-5642; doi:10.3390/ma7085633

Influence of Carrier Gas Composition on the Stress of Al2O3 Coatings Prepared by the Aerosol Deposition Method

Department of Functional Materials, University of Bayreuth, Universitätsstraße 30, Bayreuth 95440, Germany
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Received: 27 June 2014 / Revised: 29 July 2014 / Accepted: 31 July 2014 / Published: 5 August 2014
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Abstract

Al2O3 films were prepared by the aerosol deposition method at room temperature using different carrier gas compositions. The layers were deposited on alumina substrates and the film stress of the layer was calculated by measuring the deformation of the substrate. It was shown that the film stress can be halved by using oxygen instead of nitrogen or helium as the carrier gas. The substrates were annealed at different temperature steps to gain information about the temperature dependence of the reduction of the implemented stress. Total relaxation of the stress can already be achieved at 300 °C. The XRD pattern shows crystallite growth and reduction of microstrain while annealing. View Full-Text
Keywords: aerosol deposition; film stress; Al2O3; carrier gas; room temperature impact consolidation (RTIC) aerosol deposition; film stress; Al2O3; carrier gas; room temperature impact consolidation (RTIC)
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Schubert, M.; Exner, J.; Moos, R. Influence of Carrier Gas Composition on the Stress of Al2O3 Coatings Prepared by the Aerosol Deposition Method. Materials 2014, 7, 5633-5642.

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