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Materials 2013, 6(8), 3094-3107; doi:10.3390/ma6083094
Article

Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts

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Received: 30 April 2013; in revised form: 10 July 2013 / Accepted: 18 July 2013 / Published: 24 July 2013
(This article belongs to the Special Issue Carbon Nanotubes)
Download PDF [932 KB, uploaded 24 July 2013]
Abstract: Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors at low cost. In this work, we demonstrate that the characteristics of CNTs grown on specific locations can be changed by tuning the synthesis conditions. We also investigate the role of the contact between CNTs and the Si microsystem; observing a large influence on the electrical characteristics of our devices. Different contact modes can render either an ohmic or Schottky-like rectifying characteristics.
Keywords: carbon nanotubes; local synthesis; microheater; contacts; Schottky barrier carbon nanotubes; local synthesis; microheater; contacts; Schottky barrier
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Haugen, T.B.; Ta, B.Q.; Halvorsen, E.; Hoivik, N.; Aasmundtveit, K.E. Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts. Materials 2013, 6, 3094-3107.

AMA Style

Haugen TB, Ta BQ, Halvorsen E, Hoivik N, Aasmundtveit KE. Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts. Materials. 2013; 6(8):3094-3107.

Chicago/Turabian Style

Haugen, Tormod B.; Ta, Bao Q.; Halvorsen, Einar; Hoivik, Nils; Aasmundtveit, Knut E. 2013. "Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts." Materials 6, no. 8: 3094-3107.


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