Journal: Materials, 2012
Article: Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
Authors: Yunbo Shi, Hao Guo, Haiqiao Ni, Chenyang Xue, Zhichuan Niu, Jun Tang, Jun Liu, Wendong Zhang, Jifang He, Mifeng Li and Ying Yu
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