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Journal: Materials, 2012
Volume: 5
Page(s): 2917-2926
2917-2926
Article: Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
Shi, Y.; Guo, H.; Ni, H.; Xue, C.; Niu, Z.; Tang, J.; Liu, J.; Zhang, W.; He, J.; Li, M.; Yu, Y.

http://www.mdpi.com/1996-1944/5/12/2917

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