Materials 2012, 5(12), 2917-2926; doi:10.3390/ma5122917
Article

Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application

Received: 24 October 2012; in revised form: 4 December 2012 / Accepted: 10 December 2012 / Published: 17 December 2012
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Resonant Tunneling Diodes (RTD) and High Electron Mobility Transistor (HEMT) based on GaAs, as the piezoresistive sensing element, exhibit extremely high sensitivity in the MEMS sensors based on GaAs. To further expand their applications to the fields of MEMS sensors based on Si, we have studied the optimization of the GaAs epitaxy layers on Si wafers. Matching superlattice and strain superlattice were used, and the surface defect density can be improved by two orders of magnitude. Combing with the Raman spectrum, the residual stress was characterized, and it can be concluded from the experimental results that the residual stress can be reduced by 50%, in comparison with the original substrate. This method gives us a solution to optimize the epitaxy GaAs layers on Si substrate, which will also optimize our future process of integration RTD and HEMT based on GaAs on Si substrate for the MEMS sensor applications.
Keywords: residual stress; GaAs-on-Si; MEMS sensors
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MDPI and ACS Style

Shi, Y.; Guo, H.; Ni, H.; Xue, C.; Niu, Z.; Tang, J.; Liu, J.; Zhang, W.; He, J.; Li, M.; Yu, Y. Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application. Materials 2012, 5, 2917-2926.

AMA Style

Shi Y, Guo H, Ni H, Xue C, Niu Z, Tang J, Liu J, Zhang W, He J, Li M, Yu Y. Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application. Materials. 2012; 5(12):2917-2926.

Chicago/Turabian Style

Shi, Yunbo; Guo, Hao; Ni, Haiqiao; Xue, Chenyang; Niu, Zhichuan; Tang, Jun; Liu, Jun; Zhang, Wendong; He, Jifang; Li, Mifeng; Yu, Ying. 2012. "Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application." Materials 5, no. 12: 2917-2926.

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