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Graphene as a Buffer Layer for Silicon Carbide-on-Insulator Structures
Ibnu Sina Institute for Fundamental Science Studies, Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Skudai, Johor 81310, Malaysia
Department of Physics, Faculty of Mathematics and Nature Science, Semarang State University, Semarang, Jawa Tengah 50229, Indonesia
Department of Electrical Engineering, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 9402136, Japan
Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Jalan Semarak, Kuala Lumpur 54100, Malaysia
* Author to whom correspondence should be addressed.
Received: 14 September 2012; in revised form: 4 November 2012 / Accepted: 6 November 2012 / Published: 9 November 2012
Abstract: We report an innovative technique for growing the silicon carbide-on-insulator (SiCOI) structure by utilizing polycrystalline single layer graphene (SLG) as a buffer layer. The epitaxial growth was carried out using a hot-mesh chemical vapor deposition (HM-CVD) technique. Cubic SiC (3C-SiC) thin film in (111) domain was realized at relatively low substrate temperature of 750 °C. 3C-SiC energy bandgap of 2.2 eV was confirmed. The Si-O absorption band observed in the grown film can be caused by the out-diffusion of the oxygen atom from SiO2 substrate or oxygen doping during the cleaning process. Further experimental works by optimizing the cleaning process, growth parameters of the present growth method, or by using other growth methods, as well, are expected to realize a high quality SiCOI structure, thereby opening up the way for a breakthrough in the development of advanced ULSIs with multifunctionalities.
Keywords: graphene; silicon carbide; insulator; buffer layer; hot-mesh CVD
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MDPI and ACS Style
Astuti, B.; Tanikawa, M.; Rahman, S.F.A.; Yasui, K.; Hashim, A.M. Graphene as a Buffer Layer for Silicon Carbide-on-Insulator Structures. Materials 2012, 5, 2270-2279.
Astuti B, Tanikawa M, Rahman SFA, Yasui K, Hashim AM. Graphene as a Buffer Layer for Silicon Carbide-on-Insulator Structures. Materials. 2012; 5(11):2270-2279.
Astuti, Budi; Tanikawa, Masahiro; Rahman, Shaharin F.A.; Yasui, Kanji; Hashim, Abdul M. 2012. "Graphene as a Buffer Layer for Silicon Carbide-on-Insulator Structures." Materials 5, no. 11: 2270-2279.