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Materials 2017, 10(2), 212; doi:10.3390/ma10020212

Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication

1
Department of Nano-Mechatronics, UST, Korea University of Science and Technology, 217 Gajeong-Ro, Yuseong-Gu, Daejeon 34113, Korea
2
Department of Laser & Electron Beam Application, KIMM, Korea Institute of Machinery and Material, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea
3
Department of Nanomechanics, KIMM, Korea Institute of Machinery and Material, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea
*
Authors to whom correspondence should be addressed.
Academic Editor: Martin Byung-Guk Jun
Received: 30 December 2016 / Accepted: 20 February 2017 / Published: 21 February 2017
(This article belongs to the Special Issue Ultrafast Laser-Based Manufacturing)
View Full-Text   |   Download PDF [6967 KB, uploaded 22 February 2017]   |  

Abstract

This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Emitting Diode (AMOLED) manufacturing. The taper angle of the hole is adjusted by attaching the objective lens to a micro-vibrator and continuously changing the focal plane position. Eight laser pulses were used to examine how the hole characteristics vary with the first focal plane’s position, where the first pulse is focused at an initial position and the focal planes of subsequent pulses move downward. The results showed that the hole taper angle can be controlled by varying the amplitude of the continuously operating vibrator during femtosecond laser hole machining. The taper angles were changed between 31.8° and 43.9° by adjusting the vibrator amplitude at a frequency of 100 Hz. Femtosecond laser hole drilling with controllable taper angles is expected to be used in the precision micro-machining of various smart devices. View Full-Text
Keywords: taper angle control; femtosecond laser; hole drilling; Invar plate; AMOLED taper angle control; femtosecond laser; hole drilling; Invar plate; AMOLED
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Choi, W.; Kim, H.Y.; Jeon, J.W.; Chang, W.S.; Cho, S.-H. Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication. Materials 2017, 10, 212.

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