Next Article in Journal
Conjugation Length Effect on TPA-Based Optical Limiting Performance of a Series of Ladder-Type Chromophores
Previous Article in Journal
Electrospun Nanofibers Made of Silver Nanoparticles, Cellulose Nanocrystals, and Polyacrylonitrile as Substrates for Surface-Enhanced Raman Scattering
Article Menu
Issue 1 (January) cover image

Export Article

Open AccessArticle
Materials 2017, 10(1), 69; doi:10.3390/ma10010069

Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors

State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
*
Author to whom correspondence should be addressed.
Academic Editor: Federico Bella
Received: 7 November 2016 / Revised: 26 December 2016 / Accepted: 9 January 2017 / Published: 16 January 2017
(This article belongs to the Section Structure Analysis and Characterization)
View Full-Text   |   Download PDF [4924 KB, uploaded 16 January 2017]   |  

Abstract

In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that the resistances of Pt and AlN/Pt film electrodes violently increase above 600 °C and 800 °C, respectively, while the resistances of AlN/Pt/ZnO electrodes have more stable electrical resistance from room temperature to 1000 °C. The AlN/Pt/ZnO electrode, where the ZnO film was deposited at 600 °C, has the best temperature stability and can steadily work for 4 h at 1000 °C. The mechanism underlying the stable resistance of the AlN/Pt/ZnO electrode at a high temperature was investigated by analyzing the microstructure of the prepared samples. The proposed AlN/Pt/ZnO film electrode has great potential for applications in high temperature SAW sensors. View Full-Text
Keywords: high temperature electrode; SAW sensor; electrical resistance; langasite high temperature electrode; SAW sensor; electrical resistance; langasite
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Liu, X.; Peng, B.; Zhang, W.; Zhu, J.; Liu, X.; Wei, M. Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors. Materials 2017, 10, 69.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Materials EISSN 1996-1944 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top