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Energies 2014, 7(6), 3653-3663; doi:10.3390/en7063653
Article

Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation

1
, 2,* , 3
, 2
, 1
, 1
, 1
 and 2
1 Department of Electronic Engineering, National United University, No. 1, Lienda, Miaoli 36003, Taiwan 2 Department of Engineering and System Science, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu, 30013, Taiwan 3 Department of Electronic Engineering, National Chin-Yi University of Technology, No. 57, Sec. 2, Zhongshan Rd., Taiping Dist., Taichung 41170, Taiwan
* Author to whom correspondence should be addressed.
Received: 13 March 2014 / Revised: 20 May 2014 / Accepted: 5 June 2014 / Published: 13 June 2014
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Abstract

Aluminum oxide (AlOx) and plasma immersion ion implantation (PIII) were studied in relation to passivated silicon heterojunction solar cells. When aluminum oxide (AlOx) was deposited on the surface of a wafer; the electric field near the surface of wafer was enhanced; and the mobility of the carrier was improved; thus reducing carrier traps associated with dangling bonds. Using PIII enabled implanting nitrogen into the device to reduce dangling bonds and achieve the desired passivation effect. Depositing AlOx on the surface of a solar cell increased the short-circuit current density (Jsc); open-circuit voltage (Voc); and conversion efficiency from 27.84 mA/cm2; 0.52 V; and 8.97% to 29.34 mA/cm2; 0.54 V; and 9.68%; respectively. After controlling the depth and concentration of nitrogen by modulating the PIII energy; the ideal PIII condition was determined to be 2 keV and 10 min. As a result; a 15.42% conversion efficiency was thus achieved; and the Jsc; Voc; and fill factor were 37.78 mA/cm2; 0.55 V; and 0.742; respectively.
Keywords: plasma-immersion ion implantation; silicon heterojunction; solar cell plasma-immersion ion implantation; silicon heterojunction; solar cell
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Lin, Y.-H.; Wu, Y.-C.; You, H.-C.; Chen, C.-H.; Chen, P.-H.; Tsai, Y.-H.; Yang, Y.-Y.; Chang-Liao, K.S. Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation. Energies 2014, 7, 3653-3663.

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