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Sensors 2009, 9(5), 3228-3239; doi:10.3390/s90503228

Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

1,* , 2
1 Institute for Microtechnology, TU Braunschweig, Alte Salzdahlumer Str 203, 38124 Braunschweig, Germany 2 Institute for Process Measurement and Sensor Technology, TU Ilmenau, Gustav-Kirchhoff-Str. 1D-98693 Ilmenau, Germany
* Author to whom correspondence should be addressed.
Received: 3 April 2009 / Revised: 20 April 2009 / Accepted: 24 April 2009 / Published: 28 April 2009
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Germany)
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In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.
Keywords: Force sensors; diffused piezoresistors; swastika membrane; 3D measurements; NPMM Force sensors; diffused piezoresistors; swastika membrane; 3D measurements; NPMM
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Tibrewala, A.; Hofmann, N.; Phataralaoha, A.; Jäger, G.; Büttgenbach, S. Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine. Sensors 2009, 9, 3228-3239.

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