Abstract: In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.
Keywords: Force sensors; diffused piezoresistors; swastika membrane; 3D measurements; NPMM
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Tibrewala, A.; Hofmann, N.; Phataralaoha, A.; Jäger, G.; Büttgenbach, S. Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine. Sensors 2009, 9, 3228-3239.
Tibrewala A, Hofmann N, Phataralaoha A, Jäger G, Büttgenbach S. Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine. Sensors. 2009; 9(5):3228-3239.
Tibrewala, Arti; Hofmann, Norbert; Phataralaoha, Anurak; Jäger, Gerd; Büttgenbach, Stephanus. 2009. "Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine." Sensors 9, no. 5: 3228-3239.