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Wide Bandgap Semiconductor Nanorod and Thin Film Gas Sensors
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611 USA
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611 USA
Department of Electrical Engineering, University of Florida, Gainesville, FL 32611 USA
* Author to whom correspondence should be addressed.
Received: 6 April 2006; Accepted: 16 May 2006 / Published: 24 June 2006
(This article belongs to the Special Issue Gas Sensors
Abstract: In this review we discuss the advances in use of GaN and ZnO-based solid-statesensors for gas sensing applications. AlGaN/GaN high electron mobility transistors(HEMTs) show a strong dependence of source/drain current on the piezoelectricpolarization -induced two dimensional electron gas (2DEG). Furthermore, spontaneous andpiezoelectric polarization induced surface and interface charges can be used to develop verysensitive but robust sensors for the detection of gases. Pt-gated GaN Schottky diodes and Sc2O3/AlGaN/GaN metal-oxide semiconductor diodes also show large change in forwardcurrents upon exposure to H2 containing ambients. Of particular interest are methods fordetecting ethylene (C2H4), which offers problems because of its strong double bonds andhence the difficulty in dissociating it at modest temperatures. ZnO nanorods offer largesurface area, are bio-safe and offer excellent gas sensing characteristics.
Keywords: GaN; ZnO; gas sensors
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Kang, B.S.; Wang, H.-T.; Tien, L.- .; Ren, F.; Gila, B.P.; Norton, D.P.; Abernathy, C.R.; Lin, J.; Pearton, S.J. Wide Bandgap Semiconductor Nanorod and Thin Film Gas Sensors. Sensors 2006, 6, 643-666.
Kang BS, Wang H-T, Tien L- , Ren F, Gila BP, Norton DP, Abernathy CR, Lin J, Pearton SJ. Wide Bandgap Semiconductor Nanorod and Thin Film Gas Sensors. Sensors. 2006; 6(6):643-666.
Kang, Byoung S.; Wang, Hung-Ta; Tien, Li- Chia; Ren, Fan; Gila, Brent P.; Norton, David P.; Abernathy, Cammy R.; Lin, Jenshan; Pearton, Stepehn J. 2006. "Wide Bandgap Semiconductor Nanorod and Thin Film Gas Sensors." Sensors 6, no. 6: 643-666.