Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation

Abstract: To achieve dynamic error compensation in CNC machine tools, a non-contactlaser probe capable of dimensional measurement of a workpiece while it is being machinedhas been developed and presented in this paper. The measurements are automatically fedback to the machine controller for intelligent error compensations. Based on a well resolvedlaser Doppler technique and real time data acquisition, the probe delivers a very promisingdimensional accuracy at few microns over a range of 100 mm. The developed opticalmeasuring apparatus employs a differential laser Doppler arrangement allowing acquisitionof information from the workpiece surface. In addition, the measurements are traceable tostandards of frequency allowing higher precision.