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Sensors 2006, 6(6), 546-556; doi:10.3390/s6060546
Article

Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation

*  and
The University of Manchester, School of Mechanical, Aerospace and Civil Engineering. PO Box 88, Manchester, UK
* Author to whom correspondence should be addressed.
Received: 25 April 2006 / Accepted: 13 June 2006 / Published: 15 June 2006
(This article belongs to the Special Issue Intelligent Sensors)
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Abstract

To achieve dynamic error compensation in CNC machine tools, a non-contactlaser probe capable of dimensional measurement of a workpiece while it is being machinedhas been developed and presented in this paper. The measurements are automatically fedback to the machine controller for intelligent error compensations. Based on a well resolvedlaser Doppler technique and real time data acquisition, the probe delivers a very promisingdimensional accuracy at few microns over a range of 100 mm. The developed opticalmeasuring apparatus employs a differential laser Doppler arrangement allowing acquisitionof information from the workpiece surface. In addition, the measurements are traceable tostandards of frequency allowing higher precision.
Keywords: In-process inspection; Differential Laser Doppler; Error propagation In-process inspection; Differential Laser Doppler; Error propagation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Mekid, S.; Vacharanukul, K. Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation. Sensors 2006, 6, 546-556.

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