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Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor
University of Applied Sciences Aachen, Ginsterweg 1, 52428 Jülich, Germany
Institute of Thin Films and Interfaces, Research Centre Jülich GmbH, 52425 Jülich, Germany
New Mexico State University, Las Cruces, NM 88003-8001, USA
* Author to whom correspondence should be addressed.
Received: 7 April 2003; Accepted: 15 July 2003 / Published: 11 September 2003
Abstract: Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KClcontaining membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode.
Keywords: reference electrode; thin-film technique; thick-film technique; “one chip” sensor; pH sensor
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MDPI and ACS Style
Simonis, A.; Lüth, H.; Wang, J.; Schöning, J. Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor. Sensors 2003, 3, 330-339.
Simonis A, Lüth H, Wang J, Schöning J. Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor. Sensors. 2003; 3(9):330-339.
Simonis, Anette; Lüth, Hans; Wang, Joseph; Schöning, J. 2003. "Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor." Sensors 3, no. 9: 330-339.