Sensors 2003, 3(8), 285-289; doi:10.3390/s30800285
Article

The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

Zheng Jiao* email, Minghong Wu, Zheng Qin, Minghua Lu and Jianzhong Gu
Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800, P.R.China
* Author to whom correspondence should be addressed.
Received: 20 May 2003 / Accepted: 10 June 2003 / Published: 22 August 2003
(This article belongs to the Special Issue Nitric Oxide Sensors and Their Applications in Biomedical Research)
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Abstract: In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.
Keywords: Thin film; spray pyrolysis; Gas sensor; ITO

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Cite This Article

MDPI and ACS Style

Jiao, Z.; Wu, M.; Qin, Z.; Lu, M.; Gu, J. The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis. Sensors 2003, 3, 285-289.

AMA Style

Jiao Z, Wu M, Qin Z, Lu M, Gu J. The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis. Sensors. 2003; 3(8):285-289.

Chicago/Turabian Style

Jiao, Zheng; Wu, Minghong; Qin, Zheng; Lu, Minghua; Gu, Jianzhong. 2003. "The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis." Sensors 3, no. 8: 285-289.

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