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Sensors 2003, 3(8), 285-289; doi:10.3390/s30800285

The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800, P.R.China
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Received: 20 May 2003 / Accepted: 10 June 2003 / Published: 22 August 2003
(This article belongs to the Special Issue Nitric Oxide Sensors and Their Applications in Biomedical Research)
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Abstract

In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.
Keywords: Thin film; spray pyrolysis; Gas sensor; ITO Thin film; spray pyrolysis; Gas sensor; ITO
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Jiao, Z.; Wu, M.; Qin, Z.; Lu, M.; Gu, J. The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis. Sensors 2003, 3, 285-289.

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