Wideband MOEMS for the Calibration of Optical Readout Systems
Abstract
:1. Introduction
2. Technology
- the formation of a bottom electrode;
- the formation of a layer of the protective dielectric;
- the formation of the membrane;
- the release of the membrane.
3. Studying Static Parameters
4. Dynamic Parameters
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Volkov, P.; Lukyanov, A.; Goryunov, A.; Semikov, D.; Vopilkin, E.; Kraev, S.; Okhapkin, A.; Tertyshnik, A.; Arkhipova, E. Wideband MOEMS for the Calibration of Optical Readout Systems. Sensors 2021, 21, 7343. https://doi.org/10.3390/s21217343
Volkov P, Lukyanov A, Goryunov A, Semikov D, Vopilkin E, Kraev S, Okhapkin A, Tertyshnik A, Arkhipova E. Wideband MOEMS for the Calibration of Optical Readout Systems. Sensors. 2021; 21(21):7343. https://doi.org/10.3390/s21217343
Chicago/Turabian StyleVolkov, Petr, Andrey Lukyanov, Alexander Goryunov, Daniil Semikov, Evgeniy Vopilkin, Stanislav Kraev, Andrey Okhapkin, Anatoly Tertyshnik, and Ekaterina Arkhipova. 2021. "Wideband MOEMS for the Calibration of Optical Readout Systems" Sensors 21, no. 21: 7343. https://doi.org/10.3390/s21217343