5. Results and Discussion
All of the following measurements show raw current signals, directly measured without amplification or conversion into voltage signals. It can be seen that both negative and positive tunneling bias voltages were used to show reproducibility and independency of current direction due to the use of the same material on both electrodes. This may be an essential factor for the ongoing development of the circuitry of the sensor. In addition, measurements show leakage currents in the range of up to |9 pA| due to supply lines, actuation voltage, damage of the substrate by the ion beam (implantation of
), and offsets by the SMUs. Reliable operation of the tunneling section is possible up to tunneling currents of approximately 150 pA due to the high resistance of the metal–organic electrodes depending on the tunneling bias voltage of 1 V. Besides the fabrication of ultra-thin tips, carbon contamination is the most challenging difficulty for the realization of the tunneling effect with metal–organic materials. It is known that the deposited material from a metal–organic precursor is highly contaminated by
/
-carbon structures [
54]. For reliable tunneling, platinum atoms need to be located as close as possible to the edge of the tip.
Figure 10 shows the darkfield images of the TEM (transmission electron microscope) analysis and the difference in distribution of the carbon (dark) and platinum (bright) elements in the material structure depending on the chosen ion current. Higher currents lead to much higher homogeneous distribution and lower currents to the growth of large platinum grains. Details will be investigated in another survey.
Figure 11 shows the tunneling effect verification on the sensor structure (a,b), the fitted function of the sensor sensitivity (c), behavior under static load of an equivalent of 20 g (d), the difference in signal noise depending on tunneling distance (e), response of the tunneling sensor by ramp excitation by electrostatic self-test action for different tunneling bias voltage and initial tunneling tip distances (f–h). In
Figure 11a, the tunneling bias voltage is set to 1 V. To derive the exponential fitted function, the measured values from
Figure 11a are shifted upwards by 10 pA to compensate for the offset or minimum measured value in the negative region. According to phase 1 in
Figure 3, the voltage of the electrostatic actuator is increased in 100 mV steps until the initial distance between the tunneling electrodes is largely overcome at 5.20 V. The last nm, until the tunneling effect occurs (at approximately 5.25–5.27 V) and subsequently a tunneling current of 110 pA is reached (at 5.40 V), is overcome with a more sensitive step size of a few mV.
Figure 11a shows the measuring range of 20 g. The acceleration equivalent to the actuator voltage can be determined from the calculations for the deflection of the sensor structure (deflection/g) and the electrostatics (deflection/V). According to
Figure 11h, the maximum tunneling currents at a tunneling bias voltage of 1 V are in the range of 100–200 pA. The differences in the peaks show a clear dependence on the increased sensitivity of the tunneling effect by reducing the tunneling distance. Other measurements show that a continued reduction of the tunneling distance, measured by a further increase of the tunneling current, leads to a snap-in of the electrodes. The measuring range can theoretically be increased to the snap-in equivalent tunneling current but is limited to a moderate value of 20 g. Thus, the measuring range of a tunneling accelerometer in terms of the displacement is limited to the maximum tunneling distance and the snap-in point. Previous works used a much larger sensor area with long beams and a large proof mass to measure very small accelerations at high sensor signal sensitivity. Therefore, the opposing measuring range in these works is much lower with a value of 10 mg at Baski et al. [
28], and Zavracky et al. [
41], 1 mg at Liu et al. [
42,
43], 600 µg at Strobelt [
45], and 10 µg to 10 mg at Patra et al. [
36]. In the publications of Kenny et al. [
25,
26] and Rockstad et al. [
33] no data on the measuring ranges are available, but it can be assumed that these are in a similar range. Compared to the other works on tunneling accelerometers, it tends to be observed that all these works present the highest values for the resolution up to 10 ng/
[
25] due to a large seismic mass and lower thermal noise amplitude. Comparable measuring ranges to the present work are provided by Yeh et al. [
30,
31,
32] with −20–10 g, Burgner et al. [
39] and Miao et al. [
47] with ±10 g, and Dong et al. [
46] with 1 g. These works show a small sensor core area, resulting in higher stiffness and lower sensitivity. Furthermore, Kubena et al. [
34,
35] indicate a much higher measuring range of 10
4 g due to an increased stiffness and without an additional proof mass.
Figure 11b shows the proof of the exponential dependence of the tunneling effect based on the logarithmic scale and the fitted line function. The sensitivity of the sensor signal can be determined by the derivative of the fitted function and is shown in
Figure 11c. Due to the exponential dependence of the tunneling effect, the sensitivity also depends exponentially on the electrode distance. At an actuator voltage of 5.25 V (sensor operating point) and a corresponding acceleration of 0 g, a very low sensitivity of 51.8 pA/V or 0.4 pA/g is given. As the electrodes are further approached, the sensitivity increases to 374.5 pA/V or 2.9 pA/g at 5.325 V/10 g and increases significantly to a value of 2.71 nA/V or 20.9 pA/g at 5.4 V/20 g. Comparison of the sensitivity data to all previous works is difficult due to very different representations of these results. However, Dong et al. [
46] show a slope of the tunneling current from 0.9 nA at 0 g (sensor operating point) to 1.7 nA at 1 g. Compared to the present work, the signal sensitivity is two orders of magnitude higher approximately due to a larger proof mass. Additionally, the use of a metallic electrode allows improved exploitation of the tunneling current range. A much higher sensitivity of 30 µA/g up to 300 µA/g is given by Kenny et al. [
25,
26] due to a significant larger sensor size. Based on the shown values, it can be seen that the performance data of the sensor depends on the sensor size or stiffness and the resulting deflection due to an acting acceleration limited by the maximum tunneling distance of the electrodes.
According to phase 2 in
Figure 3, the position of the tunneling electrodes and the tunneling current for the operation of the sensor must be kept constant.
Figure 11d shows the static characteristics of the sensor structure at the operating point and the increase of the tunneling current of about 30 pA due to an additional load of several g caused by the electrostatic actuator at a tunneling voltage of −200 mV.
Figure 11e shows the two levels of the measurement in detail. At the offset current equivalent setpoint of 5.03 pA
rms, the peak-to-peak noise amplitude is 2.22 pA
p-p with a standard deviation of 333 fA. The course of the tunneling current after the step due to an additional load shows the increasing sensitivity with approach of the electrodes. The tunneling distance reduction to a tunneling current of 35.8 pA
rms results in a peak-to-peak noise amplitude of 19.5 pA
p-p and a standard deviation of 2.83 pA. According to this measurement, an acceleration-equivalent static noise amplitude can be derived. A clear increase of the noise amplitude with a reduction of the tunneling distance is recognizable due to an increasing tunneling effect sensitivity.
Due to the high compression of a possible tunneling current range down to several 10 pA by using metal–organic electrodes, in particular, noise sources that are independent of the movements overlay the measurement signal with a significant impact. This leads to a strong decrease in the sensor signal resolution and shows the clear requirement for metallic electrodes with low inherent resistance. The comparison with previous work on tunneling accelerometers (
Section 1.2) proves a high resolution [
25,
26,
33,
42,
43,
44,
45,
47] due to the high sensitivity of the tunneling effect, which is therefore not fully exploited in the present work.
Furthermore, the sensor structure is loaded several times by the electrostatic actuator with an equivalent acceleration. This is done by increasing and decreasing the voltage of the actuator several times according to the principle of excitation shown in
Figure 11i. In this sense, the reproducibility of the sensor signal can be demonstrated based on the course of the tunneling current. The measurement is based on different tunneling voltages and voltage steps at the actuator. Therefore,
Figure 11f–h show, on the one hand, the electrostatic load on the sensor structure with an equivalent acceleration of 20 g, and on the other hand the dependency of the tunneling currents’ amplitude on the applied tunneling bias voltage, according to Equation (10). As shown in
Section 4, the SMUs are controlled automatically by the corresponding measurement algorithms. The time required per loop is the same for all measurements. The different total time requirement per measurement in
Figure 11f–h can therefore be explained by the choice of different magnitudes of voltage steps on the actuator. The smaller the voltage step, the greater the time requirement. With decreasing step size, the resolution of the measurement increases due to an overall larger number of measuring points. The slightly different course of the tunneling currents is due to a varying initial distance of the tunneling electrodes. In
Figure 11f,h the deflection leads to dipping in the tip into the tunneling distance. In
Figure 11g the electrode oscillates and stays within a distance where the tunneling effect occurs.
With respect to previous work, the results show that instead of increasing the sensor resolution of an accelerometer [
25,
26,
33,
42,
43,
44,
45,
47], the highly sensitive tunneling effect can also be used to miniaturize the required sensor area. The sensor area in the present work is much smaller than in previous works like shown in
Table 1. With regard to the work of Kubena et al. [
34,
35] with a slightly larger size of the sensor core area than in the present work, further miniaturization was also achieved, with lower system stiffness due to much smaller radii of the electrode tips. However, the measurements show lower resolution due to the use of metal–organic materials with high inherent resistance. This confirms the need for metallic electrodes for tunneling application when using low tunneling bias voltages and moveable parts. To summarize, the tunneling effect can be demonstrated on the miniaturized tunneling sensor structure by different types of measurements. The acceleration-sensitive characteristic of the spring-mass system can be shown by static loading and keeping a certain tunneling distance. The multiple loading of the system at different tunneling voltages leads to the expected differences in the amplitude of the sensor signal, according to Equation (10). The course of the tunneling current shows reproducible values regarding to an acceleration-equivalent loading of the spring-mass system. Since no snap-in effect occurs at the approach of the tunneling electrodes, the effective system stiffness is chosen in an appropriate range. The reduction of the tunneling distance leads to a higher sensitivity due to the exponential dependence of the tunneling effect.
6. Conclusions
The further miniaturization of acceleration sensors reaches its limits using conventional transducer principles due to scaling laws when the sensor structures are isometrically reduced in size. In this work, the miniaturization potential of acceleration sensors was investigated using the highly sensitive tunneling effect. The theoretical design of the sensor structures requires an in-depth analysis of the relationships between tunneling effect, geometric shape, and size of the spring-mass structures, and the electrostatic actuator parameters. A crucial aspect concerning the tunneling distance are the attractive forces between the tunneling electrodes as a function of the electrodes’ geometric shape. The tunneling electrodes are implemented after fabrication of the sensor structures using MEMSCAP Inc. foundry service PolyMUMPs by deposition of metal–organic precursor material () using a focused ion beam () with a gas injection system. This led to significant challenges generating electrode tips of few nm in radius. An analysis of the metal–organic microstructure and suitable parameters of the FIB is required to ensure the suitability of the electrodes for the tunneling effect. This showed the necessity of high ion currents (260 pA, 30 kV) for an increased platinum content in the microstructure and a homogeneous distribution of the platinum grains. Using the metal–organic electrodes, tunneling currents up to 150 pA were measured reliably, depending on the tunneling voltage. The limitation is due to the electrodes’ high material resistance, especially because of the tip radii of a few nm. The research results follow the essential requirement for metallic “pure” materials since the metal–organic materials significantly limit the measuring range. In comparison, a scanning tunneling microscope with a metal tip achieves tunneling currents up to some 10 nA at a low tunneling bias voltage of 100 mV.
Electrode tips with radii down to 10 ± 5 nm were fabricated, and initial electrode spacings of about 30 nm to 300 nm were achieved. This corresponds to operating voltages in the range of 4 to 13.5 V, depending on the electrostatic actuators’ size.
To prevent contamination of the tunneling tips and to ensure constant ambient conditions, measurements were performed in vacuum environment. For operation in atmospheric conditions, the sensor structures need to be encapsulated to prevent contamination of the electrode tips.
Following the objective of the work, the tunneling effect was demonstrated at highly miniaturized structure sizes of several 10 × 10 µm2. The stiffness of the structures is limited by the attractive forces on the tunneling electrodes. Tunneling bias voltages from 200 mV to 1 V were applied to the sensor and a measuring range of 20 g was realized. The metrological characterization showed the exponential dependence between tunneling current and electrode distance. Thus, the sensor signal sensitivity ranges from 0.4 pA/g at 0 g in the sensor operational point up to 20.9 pA/g at 20 g. Due to the increasing sensitivity of the tunneling effect, the signal noise increases significantly with the shortening of the tunneling distance. Using self-test actions, the sensor structures were loaded or excited with an equivalent acceleration, and in this way, the acceleration-sensitive function was demonstrated. The multiple excitation at different tunneling bias voltages shows a varying tunneling current amplitude, which is in good agreement with the calculations. The findings by the investigation in this work show the high potential for miniaturization of accelerometers using the tunneling effect compared to current sensors based on other transducer principles.