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Sensors 2018, 18(9), 2919; https://doi.org/10.3390/s18092919

A Novel Type Room Temperature Surface Photovoltage Gas Sensor Device

1
Institute of Electronics, Silesian University of Technology, 44-100 Gliwice, Poland
2
Institute of Electron Technology, 02-668 Warsaw, Poland
3
SemiInstruments Company, 41-800 Zabrze, Poland
*
Author to whom correspondence should be addressed.
Received: 29 July 2018 / Revised: 20 August 2018 / Accepted: 27 August 2018 / Published: 3 September 2018
(This article belongs to the Special Issue Nanostructured Surfaces in Sensing Systems)
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Abstract

In this paper a novel type of a highly sensitive gas sensor device based on the surface photovoltage effect is described. It is based on the Kelvin probe approach. Porous ZnO nanostructured thin films deposited by the direct current (DC) reactive magnetron sputtering method are used as the active gas sensing electrode material. Crucially, the obtained gas sensing material exhibited a nanocoral surface morphology and surface Zn to O non-stoichiometry with respect to its bulk mass. Among other responses, the demonstrated SPV gas sensor device exhibits a high response to an NO2 concentration as low as 1 ppm, with a signal to noise ratio of about 50 and a fast response time of several seconds under room temperature conditions. View Full-Text
Keywords: room temperature gas sensor; surface photovoltage effect; porous ZnO nanostructured thin films room temperature gas sensor; surface photovoltage effect; porous ZnO nanostructured thin films
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Kwoka, M.; Borysiewicz, M.A.; Tomkiewicz, P.; Piotrowska, A.; Szuber, J. A Novel Type Room Temperature Surface Photovoltage Gas Sensor Device. Sensors 2018, 18, 2919.

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