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Sensors 2018, 18(3), 732; https://doi.org/10.3390/s18030732

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
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Received: 18 January 2018 / Revised: 6 February 2018 / Accepted: 10 February 2018 / Published: 1 March 2018
(This article belongs to the Special Issue Magnetic Sensors)
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Abstract

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. View Full-Text
Keywords: amorphous wire; magnetic sensor; micro coils; MEMS; miniaturization amorphous wire; magnetic sensor; micro coils; MEMS; miniaturization
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Chen, J.; Li, J.; Li, Y.; Chen, Y.; Xu, L. Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology. Sensors 2018, 18, 732.

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