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Sensors 2018, 18(2), 336; doi:10.3390/s18020336

Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy

1,2
,
3
and
1,2,*
1
Department of Engineering Mechanics, AML, Tsinghua University, Beijing 100084, China
2
Center for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China
3
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
*
Author to whom correspondence should be addressed.
Received: 1 December 2017 / Revised: 12 January 2018 / Accepted: 19 January 2018 / Published: 24 January 2018
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
View Full-Text   |   Download PDF [7160 KB, uploaded 24 January 2018]   |  

Abstract

Multi-frequency scanning near-field optical microscopy, based on a quartz tuning fork-probe (QTF-p) sensor using the first two orders of in-plane bending symmetrical vibration modes, has recently been developed. This method can simultaneously achieve positional feedback (based on the 1st in-plane mode called the low mode) and detect near-field optically induced forces (based on the 2nd in-plane mode called the high mode). Particularly, the high mode sensing performance of the QTF-p is an important issue for characterizing the tip-sample interactions and achieving higher resolution microscopic imaging but the related researches are insufficient. Here, we investigate the vibration performance of QTF-p at high mode based on the experiment and finite element method. The frequency spectrum characteristics are obtained by our homemade laser Doppler vibrometer system. The effects of the properties of the connecting glue layer and the probe features on the dynamic response of the QTF-p sensor at the high mode are investigated for optimization design. Finally, compared with the low mode, an obvious improvement of quality factor, of almost 50%, is obtained at the high mode. Meanwhile, the QTF-p sensor has a high force sensing sensitivity and a large sensing range at the high mode, indicating a broad application prospect for force sensing. View Full-Text
Keywords: quartz tuning fork-probe; high mode; dynamic mechanical behavior; finite element method; multi-frequency scanning near-field optical microscopy quartz tuning fork-probe; high mode; dynamic mechanical behavior; finite element method; multi-frequency scanning near-field optical microscopy
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhang, X.; Gao, F.; Li, X. Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy. Sensors 2018, 18, 336.

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