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Sensors 2017, 17(6), 1409; doi:10.3390/s17061409

Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing

1
CIRIMAT, Université de Toulouse, CNRS, INPT, UPS, 118 Route de Narbonne, F-31062 Toulouse CEDEX 9, France
2
LAAS-CNRS, Université de Toulouse, UPS, INSA, 7 avenue du colonel Roche, F-31031 Toulouse, France
*
Authors to whom correspondence should be addressed.
Academic Editors: Nicole Jaffrezic-Renault and Gaelle Lissorgues
Received: 31 March 2017 / Revised: 8 June 2017 / Accepted: 14 June 2017 / Published: 16 June 2017
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in France 2016)
View Full-Text   |   Download PDF [7229 KB, uploaded 21 June 2017]   |  

Abstract

P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH3), acetaldehyde (C2H4O), and nitrogen dioxide (NO2) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde. View Full-Text
Keywords: gas sensor; RF sputtering; thin film; CuO; tenorite; photolithography; metal oxide microsensor; micro-hotplate; pulsed temperature gas sensor; RF sputtering; thin film; CuO; tenorite; photolithography; metal oxide microsensor; micro-hotplate; pulsed temperature
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Presmanes, L.; Thimont, Y.; el Younsi, I.; Chapelle, A.; Blanc, F.; Talhi, C.; Bonningue, C.; Barnabé, A.; Menini, P.; Tailhades, P. Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing. Sensors 2017, 17, 1409.

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