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Sensors 2017, 17(4), 779; doi:10.3390/s17040779

Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

1
Department of Civil and Environmental Engng., Politecnico di Milano, 20133 Milano, Italy
2
MSH Division, ST Microelectronics, 20010 Cornaredo (MI), Italy
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 2 March 2017 / Revised: 30 March 2017 / Accepted: 3 April 2017 / Published: 6 April 2017
(This article belongs to the Special Issue State-of-the-Art Sensors Technologies in Italy 2016)
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Abstract

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach. View Full-Text
Keywords: micromirrors; MOEMS; Mathieu equation; parametric resonance; continuation approach; arc length algorithm; material derivative; comb-fingers; electrostatic force and torque; electrostatic stiffness micromirrors; MOEMS; Mathieu equation; parametric resonance; continuation approach; arc length algorithm; material derivative; comb-fingers; electrostatic force and torque; electrostatic stiffness
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Frangi, A.; Guerrieri, A.; Boni, N. Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness. Sensors 2017, 17, 779.

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