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Sensors 2017, 17(2), 367; doi:10.3390/s17020367

Micromachined Fluid Inertial Sensors

State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
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Academic Editor: Jörg F. Wagner
Received: 13 November 2016 / Revised: 16 January 2017 / Accepted: 24 January 2017 / Published: 14 February 2017
(This article belongs to the Special Issue Inertial Sensors and Systems 2016)
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Abstract

Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern. View Full-Text
Keywords: micromachined fluid inertial sensor; gyroscope; accelerometer; thermal convection; thermal expansion; jet flow; thermal flow micromachined fluid inertial sensor; gyroscope; accelerometer; thermal convection; thermal expansion; jet flow; thermal flow
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Liu, S.; Zhu, R. Micromachined Fluid Inertial Sensors. Sensors 2017, 17, 367.

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