System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation
AbstractRecently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope. In this study, a MEMS vibratory gyroscope is analyzed based on the system dynamic modeling; thus, it can be mathematically expressed and integrated into a circuit simulator. A behavioral simulation of the entire system was conducted to prove the self-oscillation and angular-rate detection and to determine the circuit parameters to be optimized. From the simulation, the operating characteristic according to the vacuum pressure and scale factor was obtained, which indicated similar trends compared with those of the experimental results. The simulation method presented in this paper can be generalized to a wide range of MEMS devices. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Kwon, H.J.; Seok, S.; Lim, G. System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation. Sensors 2017, 17, 2663.
Kwon HJ, Seok S, Lim G. System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation. Sensors. 2017; 17(11):2663.Chicago/Turabian Style
Kwon, Hyukjin J.; Seok, Seyeong; Lim, Geunbae. 2017. "System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation." Sensors 17, no. 11: 2663.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.