Next Article in Journal
A Loop All-Fiber Current Sensor Based on Single-Polarization Single-Mode Couplers
Next Article in Special Issue
All-Fiber Laser Curvature Sensor Using an In-Fiber Modal Interferometer Based on a Double Clad Fiber and a Multimode Fiber Structure
Previous Article in Journal
Different Ways to Apply a Measurement Instrument of E-Nose Type to Evaluate Ambient Air Quality with Respect to Odour Nuisance in a Vicinity of Municipal Processing Plants
Previous Article in Special Issue
Optical Spring Effect in Micro-Bubble Resonators and Its Application for the Effective Mass Measurement of Optomechanical Resonant Mode
Article Menu
Issue 11 (November) cover image

Export Article

Open AccessArticle
Sensors 2017, 17(11), 2652; https://doi.org/10.3390/s17112652

Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures

Department of Automatic Test and Control, Harbin Institute of Technology, Harbin 150080, China
*
Author to whom correspondence should be addressed.
Received: 17 October 2017 / Revised: 11 November 2017 / Accepted: 14 November 2017 / Published: 20 November 2017
(This article belongs to the Special Issue Optical Fiber Sensors 2017)
View Full-Text   |   Download PDF [13616 KB, uploaded 22 November 2017]   |  

Abstract

In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm. View Full-Text
Keywords: fiber optics probe; touch trigger probe; three-dimensional metrology; micro/nano coordinate measurement machine (CMM) fiber optics probe; touch trigger probe; three-dimensional metrology; micro/nano coordinate measurement machine (CMM)
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Zou, L.; Ni, H.; Zhang, P.; Ding, X. Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures. Sensors 2017, 17, 2652.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top