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Sensors 2017, 17(1), 67; doi:10.3390/s17010067

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

1
Group of Electronic Design—Aragón Institute of Engineering Research, Universidad de Zaragoza, 50009 Zaragoza, Spain
2
Institute of Information and Communication Technologies, Electronics and Applied Mathemathics, Université Catholique de Louvain, 1348 Louvain-la-Neuve, Belgium
*
Author to whom correspondence should be addressed.
Academic Editors: Mustafa Yavuz and Stefano Mariani
Received: 30 November 2016 / Revised: 16 December 2016 / Accepted: 23 December 2016 / Published: 30 December 2016
(This article belongs to the Special Issue MEMS and Nano-Sensors)
View Full-Text   |   Download PDF [3797 KB, uploaded 30 December 2016]   |  

Abstract

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz . View Full-Text
Keywords: accelerometer; capacitive sensing; microelectromechanical systems (MEMS); synchronous demodulation; transimpedance amplifier accelerometer; capacitive sensing; microelectromechanical systems (MEMS); synchronous demodulation; transimpedance amplifier
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Royo, G.; Sánchez-Azqueta, C.; Gimeno, C.; Aldea, C.; Celma, S. Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers. Sensors 2017, 17, 67.

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