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Correction: Abazari, A.M., et al. Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures. Sensors 2015, 15, 28543–28562
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Sensors 2016, 16(6), 926; doi:10.3390/s16060926

Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization

IMM-Instituto de Microelectrónica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain
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Academic Editor: W. Rudolf Seitz
Received: 20 May 2016 / Revised: 14 June 2016 / Accepted: 17 June 2016 / Published: 21 June 2016
(This article belongs to the Special Issue Nanomechanics for Sensing and Spectrometry)
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Abstract

Thickness characterization of thin films is of primary importance in a variety of nanotechnology applications, either in the semiconductor industry, quality control in nanofabrication processes or engineering of nanoelectromechanical systems (NEMS) because small thickness variability can strongly compromise the device performance. Here, we present an alternative optical method in bright field mode called Spatially Multiplexed Micro-Spectrophotometry that allows rapid and non-destructive characterization of thin films over areas of mm2 and with 1 μm of lateral resolution. We demonstrate an accuracy of 0.1% in the thickness characterization through measurements performed on four microcantilevers that expand an area of 1.8 mm2 in one minute of analysis time. The measured thickness variation in the range of few tens of nm translates into a mechanical variability that produces an error of up to 2% in the response of the studied devices when they are used to measure surface stress variations. View Full-Text
Keywords: nanomechanics; microcantilever sensors; nanomechanical sensors; thin film; microspectrophotometry; resonators; mass sensing; surface stress nanomechanics; microcantilever sensors; nanomechanical sensors; thin film; microspectrophotometry; resonators; mass sensing; surface stress
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Pini, V.; Kosaka, P.M.; Ruz, J.J.; Malvar, O.; Encinar, M.; Tamayo, J.; Calleja, M. Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization. Sensors 2016, 16, 926.

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