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Sensors 2015, 15(5), 10048-10058; doi:10.3390/s150510048

A Resonant Pressure Microsensor Capable of Self-Temperature Compensation

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 5 February 2015 / Revised: 13 April 2015 / Accepted: 22 April 2015 / Published: 29 April 2015
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped “H” type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of −40 °C to 70 °C and pressure range of 50 kPa to 110 kPa). View Full-Text
Keywords: pressure sensor; resonance; temperature self-compensation; MEMS pressure sensor; resonance; temperature self-compensation; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Li, Y.; Wang, J.; Luo, Z.; Chen, D.; Chen, J. A Resonant Pressure Microsensor Capable of Self-Temperature Compensation. Sensors 2015, 15, 10048-10058.

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