Sensors 2014, 14(4), 6910-6921; doi:10.3390/s140406910
Article

Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications

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Received: 30 December 2013; in revised form: 1 April 2014 / Accepted: 11 April 2014 / Published: 17 April 2014
(This article belongs to the Special Issue Polymeric Micro Sensors and Actuators)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This paper covers research on novel thin films with periodical microstructure—optical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectric—plasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems. Novel optical elements can be tunable under defined bias and change its main grating parameters (depth and width) influencing the response of diffraction efficiencies. These elements allow opening new avenues in the design of more sensitive and multifunctional microdevices.
Keywords: piezoelectric effect; surface plasmon resonance; silver; tunable; periodical microstructure
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MDPI and ACS Style

Ponelyte, S.; Palevicius, A. Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications. Sensors 2014, 14, 6910-6921.

AMA Style

Ponelyte S, Palevicius A. Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications. Sensors. 2014; 14(4):6910-6921.

Chicago/Turabian Style

Ponelyte, Sigita; Palevicius, Arvydas. 2014. "Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications." Sensors 14, no. 4: 6910-6921.

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