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Sensors 2014, 14(11), 20702-20712; doi:10.3390/s141120702

A Novel Wireless and Temperature-Compensated SAW Vibration Sensor

State Key Laboratory of Acoustics, Institute of Acoustic, Chinese Academy of Science, No.21, BeiSiHuan West Road, Beijing 100190, China
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Received: 23 September 2014 / Revised: 15 October 2014 / Accepted: 27 October 2014 / Published: 3 November 2014
(This article belongs to the Special Issue Acoustic Waveguide Sensors)
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Abstract

A novel wireless and passive surface acoustic wave (SAW) based temperature-compensated vibration sensor utilizing a flexible Y-cut quartz cantilever beam with a relatively substantial proof mass and two one-port resonators is developed. One resonator acts as the sensing device adjacent to the clamped end for maximum strain sensitivity, and the other one is used as the reference located on clamped end for temperature compensation for vibration sensor through the differential approach. Vibration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW travelling along the sensing device, and generated output signal varies in frequency as a function of vibration. A theoretical mode using the Rayleigh method was established to determine the optimal dimensions of the cantilever beam. Coupling of Modes (COM) model was used to extract the optimal design parameters of the SAW devices prior to fabrication. The performance of the developed SAW sensor attached to an antenna towards applied vibration was evaluated wirelessly by using the precise vibration table, programmable incubator chamber, and reader unit. High vibration sensitivity of ~10.4 kHz/g, good temperature stability, and excellent linearity were observed in the wireless measurements. View Full-Text
Keywords: vibration sensor; surface acoustic wave; Y-cut quartz; wireless and passive; cantilever beam vibration sensor; surface acoustic wave; Y-cut quartz; wireless and passive; cantilever beam
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Wang, W.; Xue, X.; Huang, Y.; Liu, X. A Novel Wireless and Temperature-Compensated SAW Vibration Sensor. Sensors 2014, 14, 20702-20712.

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