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Sensors 2014, 14(11), 20419-20438; doi:10.3390/s141120419

Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

1
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Received: 17 September 2014 / Revised: 21 October 2014 / Accepted: 22 October 2014 / Published: 29 October 2014
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case was presented. The compensation principle was described first. In the mechanical design, four types of basic structure units were presented to obtain the basic compensation function. A novel layout design was proposed to eliminate the additional disturbing static forces and torques. Parameter optimization was carried out to maximize the available compensation capability in a limited layout area. Two types of voltage loading methods were presented. Their influences on the sense mode dynamics were analyzed. The proposed design was applied on a dual-mass silicon micro-gyroscope developed in our laboratory. The theoretical compensation capability of a quadrature equivalent angular rate no more than 412 °/s was designed. In experiments, an actual quadrature equivalent angular rate of 357 °/s was compensated successfully. The actual compensation voltages were a little larger than the theoretical ones. The correctness of the design and the theoretical analyses was verified. They can be commonly used in planar linear vibratory silicon micro-gyroscopes for quadrature compensation purpose. View Full-Text
Keywords: MEMS; silicon micro-gyroscope; quadrature compensation; mechanical design MEMS; silicon micro-gyroscope; quadrature compensation; mechanical design
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ni, Y.; Li, H.; Huang, L. Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes. Sensors 2014, 14, 20419-20438.

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