Abstract: A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
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Yang, Y.; Tian, H.; Wang, Y.-F.; Shu, Y.; Zhou, C.-J.; Sun, H.; Zhang, C.-H.; Chen, H.; Ren, T.-L. An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging. Sensors 2013, 13, 9624-9634.
Yang Y, Tian H, Wang Y-F, Shu Y, Zhou C-J, Sun H, Zhang C-H, Chen H, Ren T-L. An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging. Sensors. 2013; 13(8):9624-9634.
Yang, Yi; Tian, He; Wang, Yu-Feng; Shu, Yi; Zhou, Chang-Jian; Sun, Hui; Zhang, Cang-Hai; Chen, Hao; Ren, Tian-Ling. 2013. "An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging." Sensors 13, no. 8: 9624-9634.