Sensors 2013, 13(8), 9624-9634; doi:10.3390/s130809624
Article

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

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Received: 13 June 2013; in revised form: 17 July 2013 / Accepted: 19 July 2013 / Published: 26 July 2013
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
Keywords: piezoelectric; ultrasonic transducer; Si-SOI bonding; IC integration compatibility; 3-D medical imaging
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MDPI and ACS Style

Yang, Y.; Tian, H.; Wang, Y.-F.; Shu, Y.; Zhou, C.-J.; Sun, H.; Zhang, C.-H.; Chen, H.; Ren, T.-L. An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging. Sensors 2013, 13, 9624-9634.

AMA Style

Yang Y, Tian H, Wang Y-F, Shu Y, Zhou C-J, Sun H, Zhang C-H, Chen H, Ren T-L. An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging. Sensors. 2013; 13(8):9624-9634.

Chicago/Turabian Style

Yang, Yi; Tian, He; Wang, Yu-Feng; Shu, Yi; Zhou, Chang-Jian; Sun, Hui; Zhang, Cang-Hai; Chen, Hao; Ren, Tian-Ling. 2013. "An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging." Sensors 13, no. 8: 9624-9634.

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