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Sensors 2013, 13(8), 9624-9634; doi:10.3390/s130809624
Article

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

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1 Institute of Microelectronics, Tsinghua University, Beijing 100084, China 2 Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
* Author to whom correspondence should be addressed.
Received: 13 June 2013 / Revised: 17 July 2013 / Accepted: 19 July 2013 / Published: 26 July 2013
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)
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Abstract

A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
Keywords: piezoelectric; ultrasonic transducer; Si-SOI bonding; IC integration compatibility; 3-D medical imaging piezoelectric; ultrasonic transducer; Si-SOI bonding; IC integration compatibility; 3-D medical imaging
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Yang, Y.; Tian, H.; Wang, Y.-F.; Shu, Y.; Zhou, C.-J.; Sun, H.; Zhang, C.-H.; Chen, H.; Ren, T.-L. An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging. Sensors 2013, 13, 9624-9634.

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