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Sensors 2013, 13(6), 7021-7032; doi:10.3390/s130607021
Article

Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS

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 and *
Received: 11 April 2013; in revised form: 25 April 2013 / Accepted: 13 May 2013 / Published: 28 May 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
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Abstract: We present and analyze a method to improve the morphology and mechanical properties of gold thin films for use in optical sensors or other settings where good adhesion of gold to a substrate is of importance and where controlled topography/roughness is key. To improve the adhesion of thermally evaporated gold thin films, we introduce a gold deposition step on SU-8 photoresist prior to UV exposure but after the pre-bake step of SU-8 processing. Shrinkage and distribution of residual stresses, which occur during cross-linking of the SU-8 polymer layer in the post-exposure baking step, are responsible for the higher adhesion of the top gold film to the post-deposition cured SU-8 sublayer. The SU-8 underlayer can also be used to tune the resulting gold film morphology. Our promoter-free protocol is easily integrated with existing sensor microfabrication processes.
Keywords: thin films; adhesion; elastic modulus; roughness; biomedical cantilever sensors; microfluidic sensors; SU-8; metal; gold thin films; adhesion; elastic modulus; roughness; biomedical cantilever sensors; microfluidic sensors; SU-8; metal; gold
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Moazzez, B.; O'Brien, S.M.; Merschrod S., E.F. Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS. Sensors 2013, 13, 7021-7032.

AMA Style

Moazzez B, O'Brien SM, Merschrod S. EF. Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS. Sensors. 2013; 13(6):7021-7032.

Chicago/Turabian Style

Moazzez, Behrang; O'Brien, Stacey M.; Merschrod S., Erika F. 2013. "Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS." Sensors 13, no. 6: 7021-7032.


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