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Sensors 2013, 13(12), 16801-16815; doi:10.3390/s131216801
Article

Effect of Embedded Pd Microstructures on the Flat-Band-Voltage Operation of Room Temperature ZnO-Based Liquid Petroleum Gas Sensors

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Received: 15 October 2013 / Revised: 19 November 2013 / Accepted: 25 November 2013 / Published: 5 December 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
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Abstract

Three methods were used to fabricate ZnO-based room temperature liquid petroleum gas (LPG) sensors having interdigitated metal-semiconductor-metal (MSM) structures. Specifically, devices with Pd Schottky contacts were fabricated with: (1) un-doped ZnO active layers; (2) Pd-doped ZnO active layers; and (3) un-doped ZnO layers on top of Pd microstructure arrays. All ZnO films were grown on p-type Si(111) substrates by the sol-gel method. For devices incorporating a microstructure array, Pd islands were first grown on the substrate by thermal evaporation using a 100 μm mesh shadow mask. We have estimated the sensitivity of the sensors for applied voltage from
Keywords: zinc oxide; ZnO; interdigitated; liquid petroleum gas; LPG; sol-gel; metal-semiconductor-metal; gas sensor; palladium; Pd zinc oxide; ZnO; interdigitated; liquid petroleum gas; LPG; sol-gel; metal-semiconductor-metal; gas sensor; palladium; Pd
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Ali, G.M.; Thompson, C.V.; Jasim, A.K.; Abdulbaqi, I.M.; Moore, J.C. Effect of Embedded Pd Microstructures on the Flat-Band-Voltage Operation of Room Temperature ZnO-Based Liquid Petroleum Gas Sensors. Sensors 2013, 13, 16801-16815.

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