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Sensors 2012, 12(9), 11559-11570; doi:10.3390/s120911559

A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion

1,* , 1
1 Department of Electronic Engineering, Faculty of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan 2 Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia 3 Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
* Author to whom correspondence should be addressed.
Received: 15 June 2012 / Revised: 8 August 2012 / Accepted: 14 August 2012 / Published: 24 August 2012
(This article belongs to the Special Issue Transducer Systems)
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The electro-mechanical characteristics of piezoelectric actuators which have being driven are evaluated in this paper. The force generated by actuators is measured as an inertial force of a corner cub prism which is attached to the actuators. The Doppler frequency shift of a laser beam, due to the motion of actuator, is accurately measured by a heterodyne interferometer. Subsequently, the mechanical quantities, such as velocity, acceleration, force, power and displacement, are calculated from the Doppler frequency shift. With the measurement results of current and voltage of the actuator, the relationships between electrical and mechanical characteristics are evaluated.
Keywords: piezo actuator; Doppler frequency shift; dynamic measurement; interferometer piezo actuator; Doppler frequency shift; dynamic measurement; interferometer
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Jin, T.; Takita, A.; Djamal, M.; Hou, W.; Jia, H.; Fujii, Y. A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion. Sensors 2012, 12, 11559-11570.

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