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A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma
Jozef Stefan Institute, Jamova 39, Ljubljana 1000, Slovenia
Center of Excellence for Polymer Materials and Technologies, Tehnoloski Park 24, Ljubljana 1000, Slovenia
* Author to whom correspondence should be addressed.
Received: 13 February 2012; in revised form: 14 March 2012 / Accepted: 14 March 2012 / Published: 26 March 2012
Abstract: The presented sensor for neutral oxygen atom measurement in oxygen plasma is a catalytic probe which uses fiber optics and infrared detection system to measure the gray body radiation of the catalyst. The density of neutral atoms can be determined from the temperature curve of the probe, because the catalyst is heated predominantly by the dissipation of energy caused by the heterogeneous surface recombination of neutral atoms. The advantages of this sensor are that it is simple, reliable, easy to use, noninvasive, quantitative and can be used in plasma discharge regions. By using different catalyst materials the sensor can also be applied for detection of neutral atoms in other plasmas. Sensor design, operation, example measurements and new measurement procedure for systematic characterization are presented.
Keywords: fiber optic catalytic probe; plasma probes; atom measurement; oxygen plasma
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Zaplotnik, R.; Vesel, A.; Mozetic, M. A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma. Sensors 2012, 12, 3857-3867.
Zaplotnik R, Vesel A, Mozetic M. A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma. Sensors. 2012; 12(4):3857-3867.
Zaplotnik, Rok; Vesel, Alenka; Mozetic, Miran. 2012. "A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma." Sensors 12, no. 4: 3857-3867.