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Sensors 2010, 10(4), 4040-4052; doi:10.3390/s100404040
Article

Design and Analysis of Impedance Pumps Utilizing Electromagnetic Actuation

1, 1, 2, 3,*  and 3,*
1 Department of Mechanical and Automation Engineering, Da-Yeh University, 515 Changhua, Taiwan 2 Department of Vehicle Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan 3 Department of Materials Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan
* Authors to whom correspondence should be addressed.
Received: 25 February 2010 / Revised: 19 March 2010 / Accepted: 9 April 2010 / Published: 21 April 2010
(This article belongs to the Special Issue Advances in Actuators)
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Abstract

This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnetic diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. In performing the analysis, simulated models of the magnetic field, the diaphragm displacement and the flow rate are developed using Ansoft/Maxwell3D, ANSYS FEA and FLUENT 6.3 CFD software, respectively. Overall, the simulated results reveal that a net flow rate of 52.8 μL/min can be obtained using a diaphragm displacement of 31.5 μm induced by a micro-coil input current of 0.5 A. The impedance pump proposed in this study provides a valuable contribution to the ongoing development of Lab-on-Chips (LoCs) systems.
Keywords: electromagnetic actuator; impedance pump; magnetic PDMS diaphragm; MEMS electromagnetic actuator; impedance pump; magnetic PDMS diaphragm; MEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wang, Y.-H.; Tsai, Y.-W.; Tsai, C.-H.; Lee, C.-Y.; Fu, L.-M. Design and Analysis of Impedance Pumps Utilizing Electromagnetic Actuation. Sensors 2010, 10, 4040-4052.

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