Next Article in Journal
Wall-Corner Classification Using Sonar: A New Approach Based on Geometric Features
Previous Article in Journal
The Use of Helmholtz Resonance for Measuring the Volume of Liquids and Solids
Article Menu

Export Article

Open AccessArticle
Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673

A Compact Vertical Scanner for Atomic Force Microscopes

NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea
School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea
Author to whom correspondence should be addressed.
Received: 16 September 2010 / Revised: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
View Full-Text   |   Download PDF [454 KB, uploaded 21 June 2014]   |  


A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated. View Full-Text
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top