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Sensors 2001, 1(6), 183-192; doi:10.3390/s10600183

A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference

1,2, 2, 2, 3 and 1,2,*
1 University of Applied Sciences Aachen, Ginsterweg 1, 52428 Jülich, Germany 2 Institute of Thin Films and Interfaces, Research Centre Jülich GmbH, 52425 Jülich, Germany 3 New Mexico State University, Las Cruces, NM 88003-8001, USA
* Author to whom correspondence should be addressed.
Received: 28 September 2001 / Accepted: 10 October 2001 / Published: 2 November 2001
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A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid” chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the thin-film pH sensor were studied towards the thick-film Ag/AgCl reference electrode. Measurements were performed in the capacitance/voltage (C/V) and constant capacitance (Concap) mode for different pH values keeping the concentration of chloride ions constant. No difference of the sensor behaviour could be found when comparing the results to measurements, obtained versus a conventional macroscopic Ag/AgCl reference electrode.
Keywords: Hybrid sensor chip; Thick-film reference electrode; Thin-film pH sensor Hybrid sensor chip; Thick-film reference electrode; Thin-film pH sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Simonis, A.; Krings, T.; Lüth, H.; Wang, J.; Schöning, M.J. A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference. Sensors 2001, 1, 183-192.

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