Fabrication of Convex PDMS–Parylene Microstructures for Conformal Contact of Planar Micro-Electrode Array
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication
2.1.1. Silicon Mold Preparation
2.1.2. PDMS Replica Molding
2.1.3. Metal Patterning and Parylene Insulation
2.2. Mechanical and Electrochemical Characterizations
2.3. Air Pocket Entrapment
2.4. Animal Experiments
2.5. ECoG Analysis
3. Results and Discussion
3.1. Fabrication of Hybrid PDMS/Parylene/Metal Layer
3.2. Air Pocket Entrapment
3.3. Animal Experiments
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Lee, W.R.; Im, C.; Park, H.-Y.; Seo, J.-M.; Kim, J.-M. Fabrication of Convex PDMS–Parylene Microstructures for Conformal Contact of Planar Micro-Electrode Array. Polymers 2019, 11, 1436. https://doi.org/10.3390/polym11091436
Lee WR, Im C, Park H-Y, Seo J-M, Kim J-M. Fabrication of Convex PDMS–Parylene Microstructures for Conformal Contact of Planar Micro-Electrode Array. Polymers. 2019; 11(9):1436. https://doi.org/10.3390/polym11091436
Chicago/Turabian StyleLee, Woo Ram, Changkyun Im, Hae-Yong Park, Jong-Mo Seo, and Jun-Min Kim. 2019. "Fabrication of Convex PDMS–Parylene Microstructures for Conformal Contact of Planar Micro-Electrode Array" Polymers 11, no. 9: 1436. https://doi.org/10.3390/polym11091436