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Proceedings 2018, 2(8), 423; https://doi.org/10.3390/ICEM18-05272

Elasticity Constants of a Two-Phase Tungsten Thin Film

ICD-LASMIS, Université de Technologie de Troyes, 10000 Troyes, France
Presented at the 18th International Conference on Experimental Mechanics, Brussels, Belgium, 1–5 July 2018.
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Published: 27 May 2018
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Abstract

The IET was used to determine the macroscopic elasticity constants of the multiphase coating. In order to determine the macroscopic elasticity constants of the film firstly, a critical assessment of Young’s modulus determination was done by comparing all the models proposed in the literature. The best model was identified and a study was performed to identify and quantify the most influent factors on the global uncertainty. Secondly, an enhanced formulation to determine the shear modulus of coating by IET was developed. The methodology was applied on a tungsten thin film deposited by DC magnetron sputtering.
Keywords: Young’s modulus; shear modulus; poisson’s ratio; dynamical resonant method; IET; coatings; magnetron sputtering; uncertainty; tungsten Young’s modulus; shear modulus; poisson’s ratio; dynamical resonant method; IET; coatings; magnetron sputtering; uncertainty; tungsten
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Slim, M.F.; Alhussein, A.; François, M. Elasticity Constants of a Two-Phase Tungsten Thin Film. Proceedings 2018, 2, 423.

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