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Proceedings 2017, 1(4), 588; doi:10.3390/proceedings1040588

Development of a Compact, Low-Frequency Vibration, Piezoelectric MEMS Energy Harvester

Fraunhofer Institute for Photonic Microsystems, Maria-Reiche Str. 2, 01109 Dresden, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 8 August 2017
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Abstract

This paper presents the design and fabrication of a piezoelectric MEMS cantilever harvester of optimized shape able to generate a usable amount of power from low frequency vibrations for moderate cantilever deflection. The corresponding harvester design, obtained by means of FEM simulations, comprises a trapezoidal unimorph silicon cantilever beam with a piezoelectric PZT film and a rectangular silicon tip mass. This device was fabricated by wafer-level micro-fabrication processes. The harvester provided 2 μW generated power at 123 Hz resonant frequency.
Keywords: vibration energy harvesting; piezoelectric films; micro-mechanical devices; silicon cantilever; fabrication vibration energy harvesting; piezoelectric films; micro-mechanical devices; silicon cantilever; fabrication
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Costache, F.; Pawlik, B.; Rieck, A. Development of a Compact, Low-Frequency Vibration, Piezoelectric MEMS Energy Harvester. Proceedings 2017, 1, 588.

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