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Proceedings 2017, 1(4), 572; doi:10.3390/proceedings1040572

Magnetomotive and Tension-Based Tuning of a Micromechanical Resonator

1
Department of Mechanical Engineering, Koc University, Istanbul 34450, Turkey
2
Department of Electrical and Electronics Engineering, Bogazici University, Istanbul 34342, Turkey
3
Surface Science and Technology Center, Koc University, Istanbul 34450, Turkey
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 23 August 2017
Download PDF [748 KB, uploaded 23 August 2017]

Abstract

Bidirectional frequency tuning in microresonators is demonstrated through the simultaneous use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed to increase the resonance frequency, while the magnetomotive method provides actuation and spring softening. The fabrication process is presented for a double-clamped micromechanical nickel resonator. Lorentz Force is used for excitation and flexural deformation of the resonator. A substrate bending method is utilized to introduce uniaxial tension in the resonator. As a result of flexural deformation, up to 13% decrease in the resonance frequency is achieved. An 8% increase in the resonance frequency is obtained by the stretching method. The presented study is the first demonstration of the combination of the aforementioned techniques for the bidirectional and wide-range frequency tuning up to 200 kHz.
Keywords: mechanical resonator; tunable resonator; magnetomotive tuning; micro/nano electromechanical resonators; resonance frequency tuning; RF MEMS; magnetic actuation mechanical resonator; tunable resonator; magnetomotive tuning; micro/nano electromechanical resonators; resonance frequency tuning; RF MEMS; magnetic actuation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Bicer, M.; Yalcinkaya, A.D.; Alaca, B.E. Magnetomotive and Tension-Based Tuning of a Micromechanical Resonator. Proceedings 2017, 1, 572.

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