A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer†
AbstractThis work presents the design and simulation of a MEMS-controllable linear motion Fresnel Zone Plate (FZP). The focal length of an FZP is a function of incident wavelength. This principle can be used for separating wavelengths, enabling a spectrometer application. The FZP of this work is designed on a linearly moving MEMS actuator, enabling wavelength focusing onto a fixed image plane. The FZP is designed with 400 zones, which can focus wavelengths from 150 nm to 410 nm by moving on a distance of 1 mm.
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Afsharipour, E.; Glowacki, P.; Shafai, C. A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer. Proceedings 2017, 1, 563.
Afsharipour E, Glowacki P, Shafai C. A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer. Proceedings. 2017; 1(4):563.Chicago/Turabian Style
Afsharipour, Elnaz; Glowacki, Pawel; Shafai, Cyrus. 2017. "A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer." Proceedings 1, no. 4: 563.