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Proceedings 2017, 1(4), 563; doi:10.3390/proceedings1040563

A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 5 September 2017
Download PDF [787 KB, uploaded 12 October 2017]

Abstract

This work presents the design and simulation of a MEMS-controllable linear motion Fresnel Zone Plate (FZP). The focal length of an FZP is a function of incident wavelength. This principle can be used for separating wavelengths, enabling a spectrometer application. The FZP of this work is designed on a linearly moving MEMS actuator, enabling wavelength focusing onto a fixed image plane. The FZP is designed with 400 zones, which can focus wavelengths from 150 nm to 410 nm by moving on a distance of 1 mm.
Keywords: Fresnel Zone Plate; MEMS FZP; Lorentz force actuator; miniaturized spectrometer; diffractive wavelength selection Fresnel Zone Plate; MEMS FZP; Lorentz force actuator; miniaturized spectrometer; diffractive wavelength selection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Afsharipour, E.; Glowacki, P.; Shafai, C. A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer. Proceedings 2017, 1, 563.

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