Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films†
AbstractThis study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.
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Camps, T.; Abada, S.; Reig, B.; Doucet, J.-B.; Courson, R.; Salvi, L.; Boisnard, B.; Daran, E.; Bardinal, V. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films. Proceedings 2017, 1, 551.
Camps T, Abada S, Reig B, Doucet J-B, Courson R, Salvi L, Boisnard B, Daran E, Bardinal V. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films. Proceedings. 2017; 1(4):551.Chicago/Turabian Style
Camps, Thierry; Abada, Sami; Reig, Benjamin; Doucet, Jean-Baptiste; Courson, Rémi; Salvi, Laurène; Boisnard, Benjamin; Daran, Emmanuelle; Bardinal, Véronique. 2017. "Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films." Proceedings 1, no. 4: 551.
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