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Proceedings 2017, 1(4), 551; doi:10.3390/proceedings1040551

Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

CNRS, LAAS, Univ de Toulouse, 7 avenue du colonel Roche, F-31400 Toulouse, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 16 August 2016
(This article belongs to the Proceedings of Eurosensors 2017)
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Abstract

This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.
Keywords: MOEMS; micro-optics; dry thick resist film; SU-8; wafer-scale fabrication; VCSELs; dynamic beam shaping MOEMS; micro-optics; dry thick resist film; SU-8; wafer-scale fabrication; VCSELs; dynamic beam shaping
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Camps, T.; Abada, S.; Reig, B.; Doucet, J.-B.; Courson, R.; Salvi, L.; Boisnard, B.; Daran, E.; Bardinal, V. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films. Proceedings 2017, 1, 551.

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