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Proceedings 2017, 1(4), 417; doi:10.3390/proceedings1040417

Tuning of the Humidity-Interference in Gas Sensitive Columnar ZnO Structures

1
Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, 08193 Barcelona, Spain
2
Institute of Physics of Materials, Academy of Sciences of Czech Republic, Žižkova 22, 61662 Brno, Czech Republic
3
Department of Microelectronics, SIX Research Centre, Faculty of Electrical Engineering an Communication, Brno University of Technology, Technická 3058/10, 61600 Brno, Czech Republic
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 23 August 2017
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Abstract

Gas microsensors based on columnar zinc oxide structures (rods and needles) with different aspect ratios and wetting properties are developed via aerosol-assisted chemical vapor deposition. The correlation between their wetting properties and degree of humidity-interference in gas sensing is presented. Gas sensing tests of these systems to hydrogen demonstrate noticeable lower humidity-interference for the columnar zinc oxide structures in the form of needles provided of higher hydrophobicity, as opposed to those in the form of rods, suggesting that a tuning of the wetting properties in metal oxides could allow for the humidity-resilient detection of gaseous analytes.
Keywords: gas sensor; humidity; ZnO; AACVD gas sensor; humidity; ZnO; AACVD
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Vallejos, S.; Gràcia, I.; Pizúrová, N.; Figueras, E.; Hubálek, J.; Cané, C. Tuning of the Humidity-Interference in Gas Sensitive Columnar ZnO Structures. Proceedings 2017, 1, 417.

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