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Proceedings 2017, 1(4), 385; doi:10.3390/proceedings1040385

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

1
Technische Universität Braunschweig, Institut für Mikrotechnik, Braunschweig, Germany
2
Technische Universität Braunschweig, Institut für Festkörpermechanik, Braunschweig, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 4 August 2017
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Abstract

In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galvanic riveting. The initial deformation of the differential actuators needed to access their actuation potential is implemented during the gripper connection to energy supply.
Keywords: SMA; actuator; micro-gripper; femtosecond laser SMA; actuator; micro-gripper; femtosecond laser
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Garcés-Schröder, M.; Hecht, L.; Vierheller, A.; Leester-Schädel, M.; Böl, M.; Dietzel, A. Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting. Proceedings 2017, 1, 385.

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