Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films†
AbstractWhen targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local resolution. To achieve this goal, an additional stimulus is applied to the cantilever with respect to the mechanical stimulus provided by the macroscopic piezoelectric actuator. This additional stimulus is generated by an aluminium nitride based piezoelectric actuator integrated on the cantilever, which is driven by a phase shifted excitation. With this approach, the mechanical Q-factor measured with a laser Doppler vibrometer (LDV) in vacuum is electrically decreased by a factor of up to 1.7.
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Fischeneder, M.; Oposich, M.; Schneider, M.; Schmid, U. Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Proceedings 2017, 1, 380.
Fischeneder M, Oposich M, Schneider M, Schmid U. Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Proceedings. 2017; 1(4):380.Chicago/Turabian Style
Fischeneder, Martin; Oposich, Martin; Schneider, Michael; Schmid, Ulrich. 2017. "Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films." Proceedings 1, no. 4: 380.
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