Next Article in Journal
Thermal Stability of Micro-Structured PDMS Piezo-Electrets under Various Polymeric Reticulation Ratios for Sensor Applications
Previous Article in Journal
A Radio-Triggered Wireless Sensor Platform Powered by Soil Bacteria
Article Menu
Issue 4 (September) cover image

Article Versions

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 380; doi:10.3390/proceedings1040380

Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films

Institute of Sensor and Actuator Systems TU Wien, Vienna, Austria
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 21 August 2017
Download PDF [1544 KB, uploaded 21 August 2017]

Abstract

When targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local resolution. To achieve this goal, an additional stimulus is applied to the cantilever with respect to the mechanical stimulus provided by the macroscopic piezoelectric actuator. This additional stimulus is generated by an aluminium nitride based piezoelectric actuator integrated on the cantilever, which is driven by a phase shifted excitation. With this approach, the mechanical Q-factor measured with a laser Doppler vibrometer (LDV) in vacuum is electrically decreased by a factor of up to 1.7.
Keywords: Q-factor; MEMS cantilever; AlN; piezoelectric; phase shifted excitation; AFM; vacuum Q-factor; MEMS cantilever; AlN; piezoelectric; phase shifted excitation; AFM; vacuum
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Fischeneder, M.; Oposich, M.; Schneider, M.; Schmid, U. Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Proceedings 2017, 1, 380.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top