Next Article in Journal
Quantitative Analysis of Wine Mixtures Using an Electronic Olfactory System
Previous Article in Journal
Ultrasensitive Gas Sensors Based on Electrospun TiO2 and ZnO
Article Menu
Issue 4 (September) cover image

Article Versions

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 353; doi:10.3390/proceedings1040353

An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display

Department of Electrical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 8 August 2017
Download PDF [1080 KB, uploaded 4 September 2017]

Abstract

Bi-axial MEMS scanning mirrors are considered the key component for applications like laser scanning projectors and Lidars. Most studies have shown fabricated devices driven by open-loop operation without sensing, making it difficult to meet the requirements for practical applications. To facilitate bi-axial closed-loop operation, this work presents an electro magnetically-driven scanning mirror with piezoresistive sensing conveniently implemented in a CMOS (complementary metal oxide semiconductor) process. The measured resonant frequencies with respect to the slow and fast axes are 4.3 and 36.05 kHz, respectively, with the aim to provide SXGA display resolution.
Keywords: CMOS MEMS; electromagnetic actuation; piezoresistive sensor CMOS MEMS; electromagnetic actuation; piezoresistive sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Li, Z.-H.; Lin, Y.-T.; Lu, M.-C. An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display. Proceedings 2017, 1, 353.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top