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Proceedings 2017, 1(4), 351; doi:10.3390/proceedings1040351

Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 8 August 2017
Download PDF [801 KB, uploaded 13 October 2017]

Abstract

A versatile MEMS micro-mirror for optical platforms is presented, that operates using Lorentz force for actuation, resulting in low voltage operation. While maintaining below 20 mA drive current, this mirror has a tilting angle of over 50° and 20° around two diagonal axes and a linear motion of 1.5 mm in vertical axis. Compared to other works, it has larger angle of rotation and additional out of plane linear motion. The temperature rise on the mirror is kept bellow 25 °C to avoid thermal expansion of the support flexures and curvature of the mirror.
Keywords: multi axes actuator; large stroke actuator; optical platform; scanning micro-mirror multi axes actuator; large stroke actuator; optical platform; scanning micro-mirror
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Afsharipour, E.; Park, B.; Shafai, C. Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications. Proceedings 2017, 1, 351.

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