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Proceedings 2017, 1(4), 347; doi:10.3390/proceedings1040347

1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration

1
Department de Physique, Université Grenoble Alpes, F38000 Grenoble, France
2
CEA, LETI, Minatec Campus, F-38054 Grenoble, France
3
Matériaux et Phénomènes Quantiques, Université Paris Diderot, CNRS UMR 7162, Sorbonne Paris Cité, 75013 Paris, France
4
Vistec Electron Beam GmbH, Ilmstrass 4, 07743 JENA, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Authors to whom correspondence should be addressed.
Published: 28 August 2017
Download PDF [693 KB, uploaded 13 October 2017]

Abstract

Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for real-world applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors. These high-Q microdisks allow their Brownian motion to be resolved at few 100 MHz in ambient air. Such performance shows our VLSI process is a viable approach for the next generation of high-end sensors operating in vacuum, gas or liquid phase.
Keywords: optomechanics; microdisk resonators; quality factor; whispering gallery mode; radial breathing mode; very large scale integration optomechanics; microdisk resonators; quality factor; whispering gallery mode; radial breathing mode; very large scale integration
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hermouet, M.; Banniard, L.; Sansa, M.; Fafin, A.; Gely, M.; Pauliac, S.; Brianceau, P.; Dallery, J.-A.; Allain, P.E.; Santos, E.G.; Favero, I.; Alava, T.; Jourdan, G.; Hentz, S. 1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration. Proceedings 2017, 1, 347.

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