Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers†
AbstractMetamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patterns. Results in literature are usually based on structures of nominal dimensions, despite the significant effect of fabrication tolerances on performance. This research aims to identify the main sources of uncertainty and to investigate their effect, notably that of an irregular surface quality (i.e., roughness) of the thin metallic layer and the lithography related variations in size and shape. The effect of the shape and positioning of the resonance peak was investigated and validated using mid-infrared metamaterial absorbers. This sensitivity analysis is essential to the batch fabrication of metamaterial absorbers for MEMS applications.
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Ghaderi, M.; Karimi, E.; Ayerden, N.P.; Wolffenbuttel, R.F. Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers. Proceedings 2017, 1, 328.
Ghaderi M, Karimi E, Ayerden NP, Wolffenbuttel RF. Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers. Proceedings. 2017; 1(4):328.Chicago/Turabian Style
Ghaderi, Mohammadamir; Karimi, Ehsan; Ayerden, N. Pelin; Wolffenbuttel, Reinoud F. 2017. "Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers." Proceedings 1, no. 4: 328.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.